Publication: Parametric Model Extraction for MEMS Based on Variational Finite Element Techniques
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Parametric Model Extraction for MEMS Based on Variational Finite Element Techniques

- Part of a collection -
 

Area
MEMS

Author(s)
Jan E. Mehner

Published in
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Seoul, Korea, June 4--9, 2005

Year
2005

BibTeX
@INPROCEEDINGS{
         Mehner2005PME,
       author = "Jan E. Mehner",
       title = "Parametric Model Extraction for MEMS Based on Variational Finite Element Techniques",
       booktitle = "The 13th International Conference on Solid-State Sensors, Actuators and
         Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Seoul, Korea, June~4--9,
         2005",
       pages = "776--779",
       year = "2005",
       ad_area = "MEMS"
}


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